ENGLISH

The Physics of Micro/Nano-Fabrication

By Ivor Brodie , Julius J. Muray (auth.) , Julius J. Muray (eds.)

Book information

Publisher
Springer US
Year
1992
ISBN
978-1-4419-3221-1, 978-1-4757-6775-9
DOI
10.1007/978-1-4757-6775-9
Language
english
Format
PDF
Filesize
16 MB (17289735 bytes)
Series
Microdevices
Edition
1
Pages
622\661
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Solid State Physics;Spectroscopy and Microscopy;Co

Description

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

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