Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

By Ohmi (Author)

Book information

Publisher
CRC Press
Year
1993
ISBN
9780824787530, 9780203734827, 9781351406420, 9781351406413, 9781351406437, 9780367402341
DOI
10.1201/9780203734827
Format
PDF
Filesize
48 MB (50174997 bytes)
Edition
1
Pages
\945
Time added
2020-10-06 04:24:42
Engineering & Technology;CivilEnvironmental and Geotechnical Engineering;Water S

Description

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

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