Handbook of ion sources

Description

The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies. Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized. The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques Content: Fundamental Processes, I. Brown Introduction Basic Plasma Parameters Ionization Phenomena The Plasma Boundary Magnetic Field Effects References Characterization of Ion Sources, B.H. Wolf, K.N. Leung, B. Sharkow, R. Becker, T. Jolly, G. Alton, and J. Ishikawa Introduction Cathodes Electron Bombardment Ion Source Plasmatron Ion Sources Magnetron and Freeman Type Ion Sources Penning Ion Sources Multicusp ("Bucket" type) Ion Sources Rf Ion Sources Microwave and ECR Ion Sources =2.4 GHz ECR Ion Sources =2.4 GHz Laser Ion Source Ebis and EBIT Vacuum Arc Ion Sources Large Area Ion Sources Industrial Ion Sources and Application Liquid Metal and Field Emission Ion Sources Negative Ion Sources Surface and Thermal Ionization Ion Sources High Efficiency Ion Sources Other Ion Sources References Production of Ions from Nongaseous Materials, B.H. Wolf Introduction Methods of Ion Production from Solids Materials for Oven and High Temperature Ion Source Design Temperature Control Examples of Metal Ion Sources References Beam Formation and Transport, P. Spadtke Beam Formation Beam Transport References Ion Beam Diagnosis, P. Strehl The Most Important Ion Beam Parameters Beam Current Measurements Beam Profile Measurements Measurements in the Transverse Phase Space Measurements in the Longitudinal Phase Space References Ion Source Electronics, H. Horneff and F. Bourg Introduction Power Supplies Pulse Switch with Vacuum Tubes Pulse Switch with Transistors Pulse Switch with IGBTs Constant Current Pulse Generator with Semiconductors High Voltage Trigger Generator Pulse Line for MEVVA Ion Sources Extraction and High Voltage Power Supplies Control and Test Electronics High Power Generators Microwave Tubes Transmission Lines Stub Tuner Hazards Caused by Microwave Radiation Power Measurements References Computer Codes, P. Spadtke General Solution to Maxwell's Equations Laplace Solver Poisson and Vlasov Solver Magnetic Fields Trajectory Codes Particle-in-Cell Codes Numerical Methods Diagnosis References