PHYSICS OF SEMICONDUCTOR DEVICES

Description

This textbook describes the basic physics of semiconductors, including the hierarchy of transport models, and connects the theory with the functioning of actual semiconductor devices. Details are worked out carefully and derived from the basic physical concepts, while keeping the internal coherence of the analysis and explaining the different levels of approximation. Coverage includes the main steps used in the fabrication process of integrated circuits: diffusion, thermal oxidation, epitaxy, and ion implantation. Examples are based on silicon due to its industrial importance. Several chapters are included that provide the reader with the quantum-mechanical concepts necessary for understanding the transport properties of crystals. The behavior of crystals incorporating a position-dependent impurity distribution is described, and the different hierarchical transport models for semiconductor devices are derived (from the Boltzmann transport equation to the hydrodynamic and drift-diffusion models). The transport models are then applied to a detailed description of the main semiconductor-device architectures (bipolar, MOS, CMOS), including a number of solid-state sensors. The final chapters are devoted to the measuring methods for semiconductor-device parameters, and to a brief illustration of the scaling rules and numerical methods applied to the design of semiconductor devices. Front Matter ....Pages i-xlvii Front Matter ....Pages 1-1 Analytical Mechanics (Massimo Rudan)....Pages 3-24 Coordinate Transformations and Invariance Properties (Massimo Rudan)....Pages 25-43 Applications of the Concepts of Analytical Mechanics (Massimo Rudan)....Pages 45-74 Electromagnetism (Massimo Rudan)....Pages 75-93 Applications of the Concepts of Electromagnetism (Massimo Rudan)....Pages 95-117 Front Matter ....Pages 119-119 Classical Distribution Function and Transport Equation (Massimo Rudan)....Pages 121-141 From Classical Mechanics to Quantum Mechanics (Massimo Rudan)....Pages 143-170 Time-Independent Schrödinger Equation (Massimo Rudan)....Pages 171-192 Time-Dependent Schrödinger Equation (Massimo Rudan)....Pages 193-205 General Methods of Quantum Mechanics (Massimo Rudan)....Pages 207-218 Front Matter ....Pages 219-219 Elementary Cases (Massimo Rudan)....Pages 221-236 Cases Related to the Linear Harmonic Oscillator (Massimo Rudan)....Pages 237-246 Other Examples of the Schrödinger Equation (Massimo Rudan)....Pages 247-276 Time-Dependent Perturbation Theory (Massimo Rudan)....Pages 277-297 Front Matter ....Pages 299-299 Many-Particle Systems (Massimo Rudan)....Pages 301-326 Separation of Many-Particle Systems (Massimo Rudan)....Pages 327-337 Front Matter ....Pages 339-339 Periodic Structures (Massimo Rudan)....Pages 341-413 Electrons and Holes in Semiconductors at Equilibrium (Massimo Rudan)....Pages 415-449 Front Matter ....Pages 451-451 Mathematical Model of Semiconductor Devices (Massimo Rudan)....Pages 453-505 Generation-Recombination and Mobility (Massimo Rudan)....Pages 507-542 Front Matter ....Pages 543-543 Bipolar Devices (Massimo Rudan)....Pages 545-599 MOS Devices (Massimo Rudan)....Pages 601-669 Front Matter ....Pages 671-671 Thermal Diffusion—Ion Implantation (Massimo Rudan)....Pages 673-701 Thermal Oxidation—Layer Deposition (Massimo Rudan)....Pages 703-721 Measuring the Semiconductor Parameters (Massimo Rudan)....Pages 723-743 Back Matter ....Pages 745-917