ENGLISH

Nanofabrication: Techniques and Principles

By Steven K. Dew , Maria Stepanova (auth.) , Maria Stepanova , Steven Dew (eds.)

Book information

Publisher
Springer-Verlag Wien
Year
2012
ISBN
9783709104248, 3709104246
DOI
10.1007/978-3-7091-0424-8
Language
english
Format
PDF
Filesize
12 MB (12586305 bytes)
Edition
1
Pages
344\344
Library
Kolxo3
Time added
2013-04-15 18:00:00
Nanotechnology;Nanochemistry;Nanotechnology and MiPhotonics

Description

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

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