Chemical Vapor Deposition: Types, Uses and Selected Research

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Contents Preface Synthesis and Characteristics of Carbon Nanofibers Based on Phenolic Resin and Transition Metal Catalysts by Chemical Vapor Deposition Abstract 1. Introduction 2. Growth of Carbon Nanofibers Using Resol-Type Phenolic Resin and Fe(III) Catalyst [26] 2.1. Synthesis of CNFs with Fe(III) Catalyst 2.2. Analyses 2.2.1. SEM 2.2.2. XPS 2.2.3. BET 3. Growth of Carbon Nanofibers Using Resol-Type Phenolic Resin and Cobalt(II) Catalyst[27] 3.1. Resin Coated with Polyurethane Foam 3.2. Oxidation 3.3. Depositing Cobalt(II) Catalyst 3.4. Reduction and Growth of CNFs 3.5. Analyses 3.5.1. SEM 3.5.2. BET 3.5.3. XPS 4. Conclusion Acknowledgments References Biographical Sketch Conductive Thin Film CVD: Graphene Abstract 1. Introduction 1.1. Graphene: Definition and Properties 1.2. Graphene Synthesis via Thermal CVD on Metallic Surfaces 1.2.1. CVD Graphene Synthesis on Copper Substrates 1.2.2. CVD Graphene Synthesis on Nickel Substrates 2. About Our Research 2.1. An Overview of PE-CVD Techniques to Synthesize Graphene on Metallic Surfaces 2.2. Case Study: MW PE-CVD Growth of Graphene on Metallic Surfaces Conclusion References Advances of APCVD Graphene-Based Electrodes for Li-Ion Batteries Abstract Introduction Atmospheric Pressure Chemical Vapor Deposition Electrochemical Evaluation Conclusion References Low-Energy Plasma CVD for Epitaxy and In-Situ Doping of Group-IV Semiconductors in Nanoelectronics Abstract 1. Introduction 2. Epitaxy as a Technology Driver in Si LSI 3. Surface Orientation and Hydrogen Termination of Silicon Surface for Low-Temperature Epitaxy 4. Low-Energy ECR Plasma CVD Processing 5. Epitaxy of Silicon and Germanium 6. Epitaxy of Silicon-Germanium Alloy 7. Epitaxy of Silicon-Carbon Alloy 8. In-Situ Doping of Boron in Silicon and Germanium Epitaxy 9. Atomic-Layer Doping of Boron in Silicon Epitaxy 10. Low-Stress Silicon Nitride Film Formation under Low-Energy Nitrogen Plasma Irradiation 11. Smart Plasma Process for Semiconductor Device Fabrication 12. Challenge of Crystal Structure Transformation in Silicon Nano Sheet by Plasma-Induced Reconstruction Conclusion Acknowledgments References Biographical Sketch Index Blank Page