Thin Film Coatings: Properties, Deposition, and Applications

Description

Thin Film Coatings: Properties, Deposition, and Applications discusses the holistic subject of conventional and emerging thin film technologies without bias to a specific technology based on the existing literature. It covers properties and delves into the various methods of thin film deposition, including the most recent techniques and a direction for future developments. It also discusses the cutting-edge applications of thin film coatings such as self-healing and smart coatings, biomedical, hybrid, and scalable thin films. Finally, the concept of Industry 4.0 in thin film coating technology is examined. This book: Explores a wide range and is not specific to material and method of deposition Demonstrates the application of thin film coatings in nearly all sectors, such as energy and anti-microbial applications Details the preparation and properties of hybrid and scalable (ultra) thin materials for advanced applications Provides detailed bibliometric analyses on applications of thin film coatings Discusses Industry 4.0 and 3D printing in thin film technology With its broad coverage, this comprehensive reference will appeal to a wide audience of materials scientists and engineers and others studying and developing advanced thin film technologies. Cover Half Title Series Page Title Page Copyright Page Dedication Table of Contents Preface Acknowledgements Authors Chapter 1 Introduction to Thin Films and Coatings 1.1 Definition of Terminology 1.1.1 What Are Thin Film Materials? 1.1.2 What Are Thick Film Materials? 1.1.3 What Are the Differences between Thin and Thicker Film Materials 1.1.4 Thin Film Depositions 1.1.5 Target, Precursors, Substrate, and Coatings 1.1.6 Why Is Thin Film Deposition and Coating Important? 1.2 History and Early Uses of Thin Films 1.3 Classification of Thin Film Deposition Methods 1.4 Mechanism of Thin Film Growth 1.4.1 Frank–Van der Merwe Growth 1.4.2 Stranski–Krastanov Growth (Layer-Plus–Island) 1.4.3 Volmer–Weber (Isolated Island) Growth Mode 1.5 Parameters Influencing Thin Film Depositions 1.6 Properties of Thin Film Materials 1.7 Modern Applications of Thin Film Materials 1.8 Summary 1.9 Scope of the Book References Chapter 2 Methods of Thin Film Deposition 2.1 Introduction 2.2 Physical Vapour Deposition 2.2.1 Sputtering 2.2.1.1 Direct Current (DC) and Radiofrequency (RF) Sputtering 2.2.1.2 Magnetron Sputtering 2.2.1.3 High Power Impulse Magnetron Sputtering (HIPIMS) 2.2.1.4 Reactive Sputtering 2.2.1.5 Bias Sputtering 2.2.1.6 Equipment 2.2.2 Thermal Evaporation 2.2.2.1 Equipment 2.2.3 Ion Plating 2.2.4 Electron Beam Deposition 2.2.5 Pulsed Laser Deposition 2.2.6 Thermal Spray 2.2.6.1 Flame Spray 2.2.6.2 Plasma Spray Deposition Technique 2.2.6.3 High Velocity Oxy-Fuels 2.3 CVD Techniques 2.3.1 Science of CVD 2.3.1.1 Steps in CVD 2.3.1.2 Advantages of CVD Methods in Preparation of Thin Film Technologies 2.3.2 Atmospheric Pressure CVD 2.3.2.1 Reactors in APCVD 2.3.2.2 Advantages of APCVD 2.3.2.3 Limitations of APCVD 2.3.2.4 APCVD Parameters 2.3.3 Low Pressure Chemical Vapour Deposition 2.3.3.1 Reactors Used in LPCVD 2.3.4 Ultrahigh Vacuum CVD 2.3.4.1 Operating Principles 2.3.5 Plasma Enhanced Chemical Vapour Deposition (PECVD) 2.3.5.1 Advantages of PECVD 2.3.5.2 Disadvantages of PECVD 2.3.5.3 Applications 2.3.5.4 Parameters in PECVD 2.3.6 Sub-Atmospheric Pressure Chemical Vapour Deposition 2.4 Atomic Layer Deposition 2.4.1 Introduction 2.4.2 Principle of Atomic Layer Deposition 2.4.3 Thermal ALD 2.4.4 Plasma Assisted Atomic Layer Deposition 2.4.5 Photo-Assisted ALD 2.4.6 Metal ALD 2.4.7 Catalytic SiO[sub(2)] ALD 2.4.8 Attributes/Advantages of ALD Process 2.4.9 Precursors and Materials for ALD 2.4.10 Applications of ALD 2.4.10.1 Applications in Microelectronics 2.4.10.2 Application in the Medical Field 2.4.10.3 Applications in Photovoltaics (PV)/ Solar Cells 2.4.10.4 Application in Energy Storage Systems 2.4.10.5 Application in Desalination 2.4.10.6 Application in Catalysis 2.4.10.7 Application in Optics 2.5 Some Chemical Deposition Methods 2.5.1 Sol-Gel Technique 2.5.2 Electro-Deposition 2.5.3 Chemical Bath Deposition 2.6 Summary References Chapter 3 Characterisation Techniques of Thin Films 3.1 Classification of Characterisation Techniques 3.2 Structure Characterisation 3.2.1 Morphology of Thin Films 3.2.2 Grain Size and Crystal Analyses 3.2.3 Thin Film Defects 3.2.3.1 Surface Pre-treatments of Substrate 3.2.3.2 Thin Film Defects Formed during Deposition Processes 3.3 Topography Characterisation 3.4 Fractal Theory in Thin Films 3.5 Mechanical Characterisation 3.5.1 Nanoindentation Tests 3.5.2 Wear/Scratch Tests 3.6 Chemical Characterisation 3.6.1 Chemical Composition 3.6.2 Corrosion Characterisation 3.7 Summary of Characterisation Methods 3.8 Summary References Chapter 4 Hybrid and Scalable Thin Films 4.1 Introduction 4.1.1 What Is a Hybrid Material? 4.1.2 What Is a Hybrid Thin Film Material? 4.1.3 What Is a Multilayer Thin Film? 4.2 Properties of Thin Hybrid and Multilayer Thin Films 4.3 Free-Standing and Scalable Thin Films 4.4 Summary References Chapter 5 Bibliometric Analysis of Applications of Thin Film Materials 5.1 Introduction 5.2 Bibliometric Analyses on Thin Film Applications 5.2.1 Growth Trend over the Years 5.2.2 Thin Film Research by Country 5.2.3 Applications of Thin Film Materials 5.3 Summary References Chapter 6 Thin Films for Biomedical Applications 6.1 Introduction to Biomaterials 6.1.1 Metal and Metal Alloy Biomaterials 6.1.2 Ceramics Biomaterials 6.1.3 Biopolymers 6.1.4 Composite Biomaterials 6.2 Thin Film Materials and Their Applications in Biomaterials 6.3 Specific Applications of Thin Films in the Biomedical Sector 6.3.1 Hip Replacement 6.3.2 Knee and Shoulder Prosthesis 6.3.3 Neural/Brain Implants 6.3.4 Protein Repellent Coatings 6.4 Emerging Trends on the Application of Thin Film Materials in Biomedical Field 6.4.1 Self- Healing Biomaterial Coatings 6.4.2 Development of Hybrid Biomaterial Thin Films 6.5 Summary References Chapter 7 Thin Films for Surface Protection 7.1 Introduction to Surface Protection 7.2 Thin Film Materials in Wear Protection 7.3 Hydrophobic and Hydrophilic Thin Materials 7.4 Thin Film Materials for Corrosion Protection 7.4.1 Aluminium Oxide 7.4.2 Titanium Oxide 7.4.3 Aluminium Oxide–Titanium Oxide 7.4.4 Tantalum Oxide (Ta[sub(2)] O[sub(5)] ) 7.4.5 Titanium Nitride 7.5 Trend and Progress of Thin Film Technology in Surface Protection Industry 7.6 Summary References Chapter 8 Thin Films for Cutting Tools 8.1 Introduction to High-Speed Machining 8.2 Application of HSM 8.2.1 Aerospace Applications 8.2.2 Die and Mould Manufacturing 8.2.3 Automotive and Other Manufacturing Industries 8.3 Advantages and Disadvantage of HSM 8.3.1 Disadvantages of HSM 8.4 HSM Tools Materials 8.5 HSM Methods and Their Applications 8.6 Importance of Coating Cutting Tools for Machining Processes 8.7 Coating of Cutting Tools for HSM 8.7.1 Classification of Coating Materials Used in Cutting Tools 8.7.2 Nitrides 8.7.2.1 Titanium Nitride (TiN) 8.7.2.2 Titanium Aluminium Nitride (TiAlN) 8.7.2.3 Chromium Nitride (CrN) 8.7.2.4 Titanium Chromium Nitride (TiCrN) Coating 8.7.2.5 Zirconium Nitride 8.7.2.6 Titanium Silicium Nitride 8.7.2.7 Titanium Aluminium Silicon Nitride (TiAlSiN) 8.7.2.8 Chromium Aluminium Nitride (CrAlN) 8.7.2.9 Titanium Molybdenum Nitride (TiMoN) 8.7.2.10 Boron Nitride (BN) 8.7.3 Carbides 8.7.3.1 Titanium Carbide (TiC) 8.7.3.2 Chromium Carbide (CrC) 8.7.3.3 Tungsten Carbide (WC) 8.7.4 Others 8.7.4.1 Titanium Boride (TiB[sub(2)]) 8.7.4.2 Diamond Carbon 8.7.4.3 Molybdenum Disulphide (MoS[sub(2)] ) 8.7.4.4 Aluminium Oxide 8.8 Progress in Thin Film Materials for Cutting Tool Industry 8.9 Summary References Chapter 9 Thin Films for Electronic, Spintronics, and Optical Applications 9.1 Introduction 9.2 Importance of Optics and Spintronic Technologies 9.3 Thin Film Materials for Optic Devices 9.3.1 Oxide-Based Ceramic Coatings 9.3.2 Non-Oxide Ceramic Coatings 9.3.3 Metal-Based Thin Films 9.4 Thin Film Materials for Spintronic and Photonic Applications 9.5 Thin Film Materials for Microelectronic Applications 9.6 Thin Film Materials for Nanodevices and Flexible Gadgets 9.7 Future Outlook 9.8 Summary References Chapter 10 Thin Film Materials for Energy Applications 10.1 Energy Materials and Renewable Energy Devices 10.1.1 Introduction 10.1.2 Solar Cells and Photovoltaic Materials 10.1.3 Fuel Cells 10.1.4 Wind Turbines 10.1.5 Nuclear Reactors 10.2 Thin Film Materials for Solar Cell Device Applications 10.2.1 Introduction 10.2.2 Copper Indium Selenide/Copper Gallium Selenide 10.2.3 Cadmium Telluride Thin Films 10.2.4 Amorphous Silicon (a-Si) 10.2.5 Dye Sensitised Solar Cell 10.2.6 Perovskite Solar Cells 10.3 Thin Film Materials for Nuclear Applications 10.3.1 Introduction 10.3.2 Detectors 10.3.3 Cladding 10.3.4 Insulators 10.4 Application of Thin Films for Fuel Cells 10.4.1 Introduction 10.4.2 Low Temperature Fuel Cells 10.5 Thin Film Materials for Wind and Hydro-Power Systems 10.5.1 Wind-Power System 10.5.2 Hydro-Power System 10.6 Emerging Technologies in Thin Films for Energy Materials 10.7 Summary References Chapter 11 Smart and Self-Healing Thin Film Materials 11.1 Self-Healing Materials 11.2 Smart Thin Film Materials 11.3 Self-Healing Thin Film Materials and Applications 11.4 Smart Thin Film Materials and Their Applications 11.5 The Future of Smart and Self-Healing Thin Film Materials 11.6 Summary References Chapter 12 Thin Films for Antimicrobial Applications 12.1 Introduction 12.2 Brief Description of Microbial Characteristics 12.3 Importance of Antimicrobial Materials in Today’s Society 12.4 Thin Film Materials for Antimicrobial Applications 12.4.1 Silver Thin Film Coatings 12.4.2 TiO[sub(2)] Thin Film Coatings 2 12.4.3 Chitin/Chitosan-Based Thin Films 12.4.4 Starch Hybrid Thin Film 12.5 The Future of Thin Film Materials for Antimicrobial Applications 12.6 Summary References Chapter 13 High Entropy Alloy Thin Films 13.1 Introduction to High Entropy Alloys 13.2 Importance of HEAs in the Modern Industry 13.3 High Entropy Alloys and Thin Films 13.3.1 AlCoCrCuFeNi 13.3.2 AlCoCrFeNi 13.3.3 AlCoCrCuFeNiTi[sub(x)] and AlCoCrFeNiTi[sub(x)] 13.3.4 AlCrFeNiMn 13.3.5 AlCoCrFeNiMo[sub(x)] and AlCoCrCuFeNiMo[sub(x)] 13.3.6 AlCoCrFeNiNb[sub(x)] 13.3.7 AlCoCrFeNiSi[sub(x)] 13.3.8 Al[sub(x)] (TiVCrMnFeCoNiCu)[sub(100-x)] 13.3.9 TiNbMoMnFe 13.3.10 CoCrFeNiZr[sub(x)] 13.3.11 NbMoTaW 13.3.12 TiTaHfNbZr 13.3.13 CuMoTaWV 13.3.14 NbSiTaTiZr 13.3.15 Other HEA Thin Films 13.4 Future Application and Development of Thin Film HEAs 13.4.1 Transport and Energy Sectors 13.4.2 Gas Turbines, Rocket Nozzles, and Nuclear Plant Construction 13.4.3 Protective Coatings 13.4.4 Biomedical Applications 13.5 Summary References Chapter 14 Thin Film Technology and Industry 4.0 14.1 The Industry 4.0 14.2 Industry 4.0 and Thin Film Industry 14.3 Role/Future of Thin Film Technology in Industry 4.0 14.4 Summary References Chapter 15 Thin Films and 3D Printing Technology 15.1 Introduction to 3D Printing Technology 15.2 3D Printing and Thin Film Technology 15.2.1 Surface Engineering of AM Parts 15.2.2 Complex Structures and Patterned Thin Film Materials 15.2.3 Preparation of Flexible Substrates 15.3 Summary References Index