Ultra Clean Processing of Semiconductor Surfaces XI

By Mertens , Marc , Paul; Meuris , Marc; Heyns

Book information

Publisher
Trans Tech Publications Ltd
Year
2013
ISBN
978-3-03785-527-0, 978-1-62870-026-8
Format
PDF
Filesize
46 MB (48362749 bytes)
Pages
328\328
Time added
2014-06-29 05:00:00

Description

This extensively revised comprehensive textbook, covering a wide range of topics in systems engineering, is suitable for courses at the graduate and undergraduate levels, each with a different emphasis. There is more than enough material to cover two semesters of an undergraduate course, as well as a one semester graduate course. The pedagogy provides enough flexibility for an instructor to teach the topics in systems engineering she or he would like. This book is sufficiently broad-based for undergraduate and graduate programs in various branches of engineering and management.

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