ENGLISH

Differentiable Periodic Maps

By P. E. Conner

Book information

Publisher
Springer
Year
1979
ISBN
3540095357, 9783540095354
Language
english
Format
DJVU
Filesize
1 MB (1171746 bytes)
Series
Lecture Notes in Mathematics
Edition
2nd
Pages
186\186
Library
Kolxo3
DPI
300
Time added
2009-07-20 03:45:11

Description

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

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