ENGLISH

Micro Mechanical Systems: Principles and Technology

By T. Fukuda , Wolfgang Menz

Book information

Publisher
Elsevier Science
Year
1998
ISBN
0444823638, 9780444823632
LCC
TJ163 .M48 1998
Open Library ID
OL360470M
Language
english
Format
PDF
Filesize
13 MB (13864658 bytes)
Series
Handbook of Sensors and Actuators
Volume
Volume 6
Pages
268\278
Topic
Physics
Time added
2011-04-20 14:05:05

Description

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

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