ENGLISH

Excimer Laser Technology

By D. Basting , G. Marowsky (auth.) , Dr. Dirk Basting , Professor Dr. Gerd Marowsky (eds.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2005
ISBN
978-3-540-20056-7, 978-3-540-26667-9
DOI
10.1007/b137894
Language
english
Format
PDF
Filesize
9 MB (9663838 bytes)
Edition
1
Pages
433\437
Time added
2013-10-31 03:56:25
ElectromagnetismInstrumentation;Laser Technology and PhysicsOptics and Lasers;Physical Chemistry;Measurement SPhotonics;Physics and Applied Physics in Engineeri

Description

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

Similar books