ENGLISH

Introduction to Semiconductor Manufacturing Technology (2nd Edition)

By Hong , Xiao

Book information

Publisher
SPIE
Year
2012
ISBN
9780819490926, 9781628701043
Language
english
Format
PDF
Filesize
26 MB (27598377 bytes)
Pages
524\524
Time added
2014-06-29 05:00:00

Description

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. This book thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics. It covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.

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