ENGLISH

Tutorials in Complex Photonic Media

By Noginov M.A. , Dewar G. , McCall M.W. , Zheludev N.I.

Book information

Publisher
SPIE Press
Year
2009
ISBN
9781615837083, 1615837086, 9780819477736, 0819477737
Language
english
Format
PDF
Filesize
12 MB (12631225 bytes)
Pages
729\729
Library
Kolxo3
Time added
2012-12-29 17:00:00

Description

This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future. Topics include:- Exposure Systems- Image Formation- The Meter of Lithography- Components in Optical Lithography- Processing and Optimization- Immersion Lithography- Outlook for optical lithography The field of complex photonic media encompasses many leading-edge areas in physics, chemistry, nanotechnology, materials science, and engineering. In [i]Tutorials in Complex Photonic Media[/i], leading experts have brought together 19 tutorials on breakthroughs in modern optics, such as negative refraction, chiral media, plasmonics, photonic crystals, and organic photonics

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