ENGLISH

Electrical Characterisation of Ferroelectric Field Effect Transistors Based on Ferroelectric HfO2 Thin Films

By Ekaterina Yurchuk

Book information

Publisher
Logos Verlag Berlin
Year
2015
ISBN
9783832594787, 9783832540036
LCC
QD181.H5 .Y873 2015
Language
english
Format
PDF
Filesize
3 MB (3102250 bytes)
Series
Research at NaMLab Ser.
Edition
1
Pages
186\186
Time added
2023-08-19 19:23:04
Hafnium. ; Ferroelectric crystals.

Description

Ferroelectric field effect transistor (FeFET) memories based on a new type of ferroelectric material (silicon doped hafnium oxide) were studied within the scope of the present work. Utilisation of silicon doped hafnium oxide (Si:HfO raisebox{-0.5ex{ scriptsize 2) thin films instead of conventional perovskite ferroelectrics as a functional layer in FeFETs provides compatibility to the CMOS process as well as improved device scalability. The influence of different process parameters on the properties of Si:HfO raisebox{-0.5ex{ scriptsize 2 thin films was analysed in order to gain better insight into the occurrence of ferroelectricity in this system. A subsequent examination of the potential of this material as well as its possible limitations with the respect to the application in non-volatile memories followed. The Si:HfO raisebox{-0.5ex{ scriptsize 2-based ferroelectric transistors that were fully integrated into the state-of-the-art high-k metal gate CMOS technology were studied in this work for the first time. The memory performance of these devices scaled down to 28 nm gate length was investigated. Special attention was paid to the charge trapping phenomenon shown to significantly affect the device behaviour.

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