ENGLISH

Mechanics of Microelectromechanical Systems

By Nicolae Lobontiu , Ephrahim Garcia

Book information

Publisher
Springer
Year
2004
ISBN
9781402080135, 1402080131
LCC
TK7875 .L63 2005
Open Library ID
OL3329641M
Language
english
Format
PDF
Filesize
12 MB (12508119 bytes)
Edition
1
Pages
418\418
Topic
Physics
Library
Techlib
Time added
2009-11-09 02:42:13

Description

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies.

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