ENGLISH

Process Variations in Microsystems Manufacturing (Microsystems and Nanosystems)

By Michael Huff

Book information

Publisher
Springer
Year
2020
ISBN
3030405583, 9783030405588
Language
english
Format
PDF
Filesize
22 MB (22769163 bytes)
Pages
540\531
Time added
2024-04-24 16:17:23

Description

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

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