ENGLISH

Physical and Technical Problems of SOI Structures and Devices

By V. S. Lysenko , A. N. Nazarov (eds.) , A. J. Auberton-Hervé , B. Aspar , J. L. Pelloie (auth.) , J. P. Colinge

Book information

Publisher
Springer Netherlands
Year
1995
ISBN
978-94-010-4052-5, 978-94-011-0109-7
DOI
10.1007/978-94-011-0109-7
Language
english
Format
PDF
Filesize
32 MB (33129136 bytes)
Series
NATO ASI Series 4
Edition
1
Pages
290\295
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Optical and Electronic Materials; Characterization

Description

In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.

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