ENGLISH

Polymers for electronic applications

By Lai , Juey H

Book information

Publisher
CRC Press
Year
1989
ISBN
0-8493-4704-1, 978-1-315-89680-9, 978-1-351-07590-9, 9780849347047
Language
english
Format
PDF
Filesize
6 MB (6730583 bytes)
Edition
1
Pages
234\247
Time added
2018-04-04 20:00:00
KUNSTSTOFFE (WERKSTOFFE);HALBLEITERBAUELEMENTE + E

Description

A CRC technical reference on the use of polymers as resists in the fabrication of integrated circuits. A resist is the material in the pattern of a circuit that does down on the raw Silicon wafer. The wafer is treated to change the solubility of the material not under the resist, which "resists." The changed material is washed away. The work is primarily chemical with numerous graphs but it does not stint from mathematics where required

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