A Guide to Hands-on MEMS Design and Prototyping

Description

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online. Frontmatter Contents Preface 1 Introduction 1.1 Overview of MEMS fabrication 1.2 Shared wafer processes 1.2.1 Multiproject wafer processes 1.3 Design rules 1.4 Layout Problems References 2 Micromechanics 2.1 Springs 2.1.1 Springs connected in parallel 2.1.2 Springs connected in series 2.2 Buckling 2.3 Poisson’s ratio 2.4 Shear stress and strain 2.5 Beams in other situations 2.6 Torsion 2.7 Membranes 2.8 Test structures 2.9 Dampening 2.10 Accelerometer 2.10.1 Cantilever beam 2.10.2 Crash sensor 2.11 Pressure sensor Problems References 3 Electrostatic actuation 3.1 Mechanical restoring force 3.2 Comb-drive resonator 3.3 Cantilever beam resonator 3.4 Fixed-fixed beam resonator Problems References 4 Optical MEMS 4.1 Reflecting cantilever beam optical modulator 4.2 Single-axis torsional mirror 4.3 Dual-axis torsional mirror: Lucent lambda router optical switch 4.4 Fabry-Perot interferometer in the PolyMUMPS process 4.5 Obtaining flatness in optical MEMS devices Problems References 5 Thermal MEMS 5.1 Thermal actuator 5.2 Heatuator 5.3 Thermal bimorph 5.4 Bolometer 5.5 Thermal inkjet 5.6 Thermal damage limits in thermally actuated MEMS Problems References 6 Fluidic MEMS 6.1 Equations of motion 6.2 Microfluidics 6.2.1 Reynolds number 6.2.2 Surface tension 6.2.3 Contact angle 6.2.4 Capillary rise 6.3 Inkjet Problems References 7 Package and test 7.1 Release 7.2 Test equipment 7.3 Mechanical testing 7.4 Electrical testing 7.5 Optical characterization References 8 From prototype to product: MEMS deformable mirrors for adaptive optics References Index