Micro Light Emitting Diode: Fabrication and Devices: Micro-LED Technology

Description

This book focuses on basic fundamental and applied aspects of micro-LED, ranging from chip fabrication to transfer technology, panel integration, and various applications in fields ranging from optics to electronics to and biomedicine. The focus includes the most recent developments, including the uses in large large-area display, VR/AR display, and biomedical applications. The book is intended as a reference for advanced students and researchers with backgrounds in optoelectronics and display technology. Micro-LEDs are thin, light-emitting diodes, which have attracted considerable research interest in the last few years. They exhibit a set of exceptional properties and unique optical, electrical, and mechanical behaviors of fundamental interest, with the capability to support a range of important exciting applications that cannot be easily addressed with other technologies. The content is divided into two parts to make the book approachable to readers of various backgrounds and interests. The first provides a detailed description with fundamental materials and production approaches and assembly/manufacturing strategies designed to target readers who seek an understanding ofof essential materials and production approaches and assembly/manufacturing strategies designed to target readers who want to understand the foundational aspects. The second provides detailed, comprehensive coverage of the wide range of device applications that have been achieved. This second part targets readers who seek a detailed account of the various applications that are enabled by micro-LEDs.   Contents Part I Materials and Processes 1 Epi-Growth and Chip Fabrication Process for Micro-LEDs 1.1 Introduction 1.1.1 Mobile Phone 1.1.2 Large-Area Display 1.1.3 Ultra-High Resolution in a Small Display 1.2 Considerations in Vertical and Horizontal MOCVDs 1.2.1 Vertical Rotating Disc Reactors 1.2.2 Horizontal Planetary Reactors 1.3 The Capability of Improving Peak Efficiency 1.3.1 Peak Efficiency Affected by Defect-Related Mechanism 1.3.2 Effects of Sidewall Damage on the Peak Efficiency 1.3.3 Improvement of the Peak Efficiency by Epitaxy Structure 1.4 Epitaxy Growth Technique Between 4″ and 6″ Sapphire 1.4.1 Large-Sized Wafer Substrate 1.4.2 Relationship Between Wafer Bow and Wafer Diameter 1.4.3 Pocket/disk Design for Wafer Bowing 1.5 Device Manufacturing References 2 Quantum Dot Color Filter and Micro LED 2.1 Color Conversion Display 2.2 Quantum Dot Color Conversion Layer 2.3 CCL Patterning Process and Color Resist Composition 2.4 Optical Property 2.4.1 Color Purity 2.4.2 Efficiency 2.4.3 Blue Leakage 2.4.4 Viewing Angle 2.5 Conclusion References 3 Laser Lift-Off (LLO) Process for Micro-LED Fabrication 3.1 Introduction 3.2 Laser Lift-Off Mechanism 3.3 Lift-Off Process by Excimer Laser (193 nm, 248 nm, 308 nm) 3.4 Lift-Off Process by DPSS Laser (266 nm, 355 nm) 3.5 Supplemental Process 3.5.1 Temporary Substrate 3.5.2 Underfill and Sacrificial Layer for LED Quality Improvement 3.5.3 Light Extraction Improvement 3.5.4 Photochemical Process 3.6 Summary References 4 Transfer Technology of Micro-LEDs for Display Applications 4.1 Introduction 4.2 Manufacturing Process of Micro-LED Display Panel 4.2.1 Face-Down Manufacturing Process 4.2.2 Face-Up Manufacturing Process 4.2.3 Comparison Between Face-Down and Face-Up Processes 4.3 Mechanics of Transfer Process 4.3.1 Two Approaches to Solving the Adhesion Issue 4.3.2 Mechanical Characteristics of Transfer Media 4.4 Available Transfer Technologies 4.4.1 Electrostatic Transfer 4.4.2 Laser Transfer 4.4.3 Rubber Stamp Transfer 4.4.4 Self-Assembly Transfer 4.4.5 Roll Transfer 4.5 Some Examples of Roll Transfer 4.5.1 Roll-To-Plate Transfer of Mini-LEDs 4.5.2 Face-Up Transfer of Micro-LEDs 4.5.3 Face-Down Transfer of Micro-LEDs 4.6 Summary and Future Direction References Part II Device Applications 5 Advanced Epitaxial Growth of LEDs on Van Der Waals Materials 5.1 Introduction 5.2 Brief Summary of Conventional Epitaxy of LEDs 5.2.1 Epitaxy of III-V LEDs 5.2.2 Layer Transfer Techniques of LEDs 5.3 III-V LEDs on Van Der Waals Materials 5.3.1 Van Der Waals Epitaxy of Thin Films and Nanostructures 5.3.2 Remote Epitaxy of Thin Films and Nanostructures 5.3.3 Epitaxy of LEDs on Van Der Waals Materials 5.3.4 Layer Transfer of LEDs 5.4 Emerging Materials-Based LEDs on Van Der Waals Materials 5.4.1 TMDs-Based LEDs 5.4.2 Perovskite LEDs 5.5 Conclusion and Perspective References 6 Implantable LED for Optogenetics 6.1 Introduction 6.2 In-Vivo Optogenetics Applications 6.3 Tools for Light Delivery 6.4 Representative Optogenetic Studies in-Vivo 6.5 Power Delivery Mechanisms 6.6 Passive Wireless Battery-Free Devices 6.7 Limitations of Passive Wireless Battery-Free Devices 6.8 Active Wireless Battery-Free Devices for Studies of the Central Nervous System 6.9 Active Wireless Battery-Free Devices for Peripheral Nerves 6.10 Hybrid Devices for Other Applications 6.11 Conclusion References 7 Flexible and Stretchable Micro-LED Display 7.1 Introduction 7.2 Flexible Micro-LED 7.2.1 Technical Processes to Transfer Micro-LEDs 7.2.2 Micro-LEDs on a Flexible Substrate 7.2.3 Flexible Micro-LED Display 7.2.4 Flexible Micro-LED for Optogenetics 7.3 Stretchable Micro-LED Display 7.4 Conclusion References