Tetrahedrally Bonded Amorphous Carbon Films I

Description

This book presents the status quo of the structure, preparation, properties and applications of tetrahedrally bonded amorphous carbon (ta-C) films and compares them with related film systems. Tetrahedrally bonded amorphous carbon films (ta-C) combine some of the outstanding properties of diamond with the versatility of amorphous materials. The book compares experimental results with the predictions of theoretical analyses, condensing them to practicable rules. It is strictly application oriented, emphasizing the exceptional potential of ta-C for tribological coatings of tools and components. Front Matter ....Pages i-xxxii Front Matter ....Pages 1-1 Carbon (Bernd Schultrich)....Pages 3-40 Diamond Films (Bernd Schultrich)....Pages 41-83 Nanodiamond Films (Bernd Schultrich)....Pages 85-104 Amorphous Carbon Films (Bernd Schultrich)....Pages 105-110 Hydrogenated Amorphous Carbon Films (a-C:H) (Bernd Schultrich)....Pages 111-192 Front Matter ....Pages 193-193 Structure of Amorphous Carbon (Bernd Schultrich)....Pages 195-272 Influence of Deposition Conditions (Bernd Schultrich)....Pages 273-298 Growth of ta-C Films (Bernd Schultrich)....Pages 299-370 Front Matter ....Pages 371-371 Vacuum Arc Discharges with Carbon Cathodes (Bernd Schultrich)....Pages 373-452 Methods of Vacuum Arc Deposition of ta-C Films (Bernd Schultrich)....Pages 453-491 Vacuum Arc with Particle Filtering (Bernd Schultrich)....Pages 493-526 Special Arc Modes with Reduced Macroparticle Emission (Bernd Schultrich)....Pages 527-543 Vacuum Arc Equipment for Mass Production of ta-C Coatings (Bernd Schultrich)....Pages 545-581 Front Matter ....Pages 583-583 Carbon Ablation with ns Lasers (Bernd Schultrich)....Pages 585-631 Carbon Film Deposition with ns Lasers (Bernd Schultrich)....Pages 633-659 Related Deposition Methods (Bernd Schultrich)....Pages 661-678 Activated Sputter Deposition of ta-C Films (Bernd Schultrich)....Pages 679-719 Back Matter ....Pages 721-752