Materials Processing by Cluster Ion Beams: History, Technology, and Applications

By Isao Yamada (Author)

Book information

Publisher
CRC Press
Year
2015
ISBN
9781498711753, 9781498711760, 9780429194573, 9781498733878, 9780367836399, 9780367872298
DOI
10.1201/b18745
Format
PDF
Filesize
26 MB (27149275 bytes)
Edition
1
Pages
\258
Time added
2020-10-06 04:24:42
Engineering & Technology;Electrical & Electronic E

Description

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f

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