ENGLISH

Micromachines as Tools for Nanotechnology

By Hiroyuki Fujita (auth.) , Professor Hiroyuki Fujita (eds.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2003
ISBN
978-3-642-62465-0, 978-3-642-55503-9
DOI
10.1007/978-3-642-55503-9
Language
english
Format
PDF
Filesize
7 MB (7030961 bytes)
Series
Microtechnology and MEMS
Edition
1
Pages
211\217
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
general; Operating ProceduresInstrumentationMaterials Treatment; Electronics and MicroelectronNanotechnology; Condensed Matter Physics; Engineer

Description

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.

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