ENGLISH

Handbook of Ellipsometry

By Harland Tompkins , Eugene A Haber

Book information

Publisher
William Andrew Pub.; Springer
Year
2005
ISBN
9780815514992, 0-8155-1499-9, 3540222936
Open Library ID
OL8048880M
Language
english
Format
PDF
Filesize
9 MB (9475258 bytes)
Series
Materials Science and Process Technology
Pages
902\902
Topic
Physics Optics
Library
mexmat
Time added
2009-07-20 03:45:11
каталогитаблицыФизика;Оптика;Справочники

Description

Fifteen contributors in industry and universities in the US, Sweden, Germany, and the Czech Republic have written on the latest developments and applications of ellipsometry. The theory of ellipsometry, the optical physics of materials, and data analysis for spectroscopic ellipsometry are described at length. Subsequent chapters concern instrumentation, including the optical components and the simple PCSA ellipsometer, the rotating polarizer and analyzer, polarization modulation, and multichannel methods. Current applications are described for SiO2 films (by Eugene A. Irene of the U. of North Carolina) and for generalized ellipsometry (by Mathias Schubert of the U. Leipzig in Germany) in chapters that include discussion of theory. New developments such as VUV ellipsometry, spectroscopic infrared, and applications in the life sciences are the topics of the final chapters. Each chapter concludes with a bibliography

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