ENGLISH

An Introduction to Microelectromechanical Systems Engineering

By Nadim Maluf , Kirt Williams

Book information

Publisher
Artech House Publishers
Year
2004
ISBN
9781580535908, 1580535909
Open Library ID
OL17149226M
Language
english
Format
PDF
Filesize
4 MB (4524967 bytes)
Edition
2
Pages
304\304
Topic
Technique
Time added
2010-05-17 00:23:50

Description

I have an interest in MEMS sensors and R&D efforts in such sensors, but little background in semiconductor processes. This book was a quick and painless introduction to the MEMS field from end to end. Complements and introduces the "handbooks" and their contents rather well.

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